Texture Development and Abnormal Grain Growth in Thin Films
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C.V. Thompson
Dept. of Materials Science and Engineering, MIT
H.J. Frost
Thayer School of Engineering, Dartmouth College
Students from MIT and Dartmouth |
Objectives:
- Why texture matters (with a focus on MEMS)
- Structure evolution during film formation
- Texture evolution during film growth
- Texture evolution during annealing -normal and abnormal grain growth -strain, surface and interface energy
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Some Applications of Polycrystalline Thin Films
Hard, Decorative, and Optical Coatings
Electronic Devices and Systems
Conductors in devices and circuits
Device materials -thin film transistors
Magnetic Devices and Systems -Continuous and patterned storage media -Read/Write devices
Photonic Devices and Systems
Micromirrors
Waveguides
Microelectromechanical Devices and Systems
Micromirrors, microcontacts, actuators, biomedical devices, …
The grain structure and texture of polycrystalline films affect performance and reliability in all cases.
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Surface Micromaching for Microelectromechanical Devices and Systems |  | | Dry Etch | Dry Etch
| Wet Etch
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