The Materials for Micro and Nano Systems Group conduct research on thin films and nanostructures for use in micro- and nano-systems, especially electronic and electromechanical systems. One area of special interest is structure evolution during film formation and during post-patterning processing. For these studies, in-situ stress and structure characterization are combined to study kinetic processes that affect the properties of films and surfaces, both during and after deposition. Probe-based and electron microscopy are also used to characterize structure evolution in continuous and patterned films, as a function of thermal, mechanical, and electrical processes. The latter includes in-situ studies of electromigration-induced void dynamics in nano-scale electrical interconnects. Other interconnect-related research includes studies of processing and properties of bonded interconnects in 3-dimensional integrated circuits, and research on growth, integration, and characterization of carbon nanotubes for use in future interconnect systems. Another major theme in Professor Thompson’s research is development of techniques for organizing large systems of nano-scale materials, including carbon nanotubes, semiconductor and metallic nano-wires, and metallic nano-crystals.